Super Systems Inc. Vacuum Furnace Controls and Troubleshooting
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Vacuum System
• Units of Pressure
• Sensor Technologies
• Gas Compensation
• Ultimate Vacuum Requirements
• Real Leak versus Virtual Leak
• Leak Rate,
• Backstreaming
• Surface Discoloration
Partial Pressure Atmospheres
• Vaporization Temperatures & Table
• Dew Point Requirements,
• Sensor Technology,
• Partial Pressure Technology: Solenoid Valve vs MFC
Heating Methods
• SCR + Rheostat
• Multiple SCRs (Digital Trim)
• Initial Survey Requirements
Outgassing
Load Thermocouples
• Extension Wire
Fixture Material Selection
• Eutectic Points
Quench Methods
• Vacuum Cooling,
• Controlled Cooling,
• Gas Fan Quench,
• Oil Quenching